– The main body temperature adjustment system of the room temperature follow type is installed.

– Perfect heat symmetry frame structure, and the structure was analyzed by the finite element analysis.

– The linear motor drive is adopted for all axes.

– The suction power has been counterbalanced by making of opposed layout of linear motor, and the offset load that influences the movement part and the guide is controlled.

– Special, precision linear motion guide is adopted.

– A micro waving that became a problem in the past is controlled. The high surface fineness that waving doesn’t influence is achieved.

– Spindle with stability and trust

– The spindle runout in all rotation region is controlled by adopting the new clamping system without spring. It achieves high accuracy and the high quality.